EBARA integrates dry pumps and gas combustion into one unit.
VIPS sets you free from connecting operation and maintenance of utilities, piping from pump to scrubber and heater unit.
Easy maintenance.
Shortened piping from dry pump to scrubber.
Preformed footprint and piping.
Max. 8 Pumps integrated.
Flexible selection for pump & rack design
Integrated operation & interlock function.
Safety design, easier detecting gas leakage.
Specifications
Model
ebara VIPS
Scrubber(combustion)
GDC / G5
Availavle dry pump
ESR Series, EST Series, ESA Series, EV-S Series
Structure
GDC x1 + Pump x2
GDC x1 + Pump x4
GDC x1 + Pump x8
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