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ebaraVIPS
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Features
- EBARA integrates dry pumps and gas combustion into one unit.
VIPS sets you free from connecting operation and maintenance of utilities, piping from pump to scrubber and heater unit. -
- Easy maintenance.
- Shortened piping from dry pump to scrubber.
- Preformed footprint and piping.
- Max. 8 Pumps integrated.
- Flexible selection for pump & rack design
- Integrated operation & interlock function.
- Safety design, easier detecting gas leakage.
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Specifications
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Model ebara VIPS Scrubber(combustion) GDC / G5 Availavle dry pump ESR Series, EST Series, ESA Series, EV-S Series
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Structure
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GDC x1 + Pump x2
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GDC x1 + Pump x4
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GDC x1 + Pump x8
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Copyrights (C) 2010 Ebara Precision Machinery Taiwan Inc. All Rights Reserved.