____The VOS Series has the highest pumping speed to footprint ratio in the industry. The VOS is a multistage lobe pump designed for installation on or very close to the process tool for clean and light duty applications such as Load Lock and SEM.
____VOS series pumps are lighter, more compact and pumpdown faster than most point-of-use pumps on the market today.
- Highest pumping speed to footprint ratio in the industry
- Unique pumping mechanism for fast pumpdowns
- Low Cost of Ownership
- No Nitrogen purge required in clean applications
- Robust, proven lobe style design
- High performance brushless DC motor
- Digital and analog signals available for interface to process tools
- Stackable installation available
- SEMI S2 assessed, NRTL Listed, CE Marked
VOS 100 Series Specifications:
| Pumping Speed 50/60 Hz |
CFM L/min M3/Hr |
64 1800 108 |
| Ultimate Pressure 50/60 Hz |
mTorr Pa mBar |
9 1.2 0.012 |
| Connection | Gas Inlet | NW 50 |
| Gas Outlet | NW 25 | |
| Power at Ultimate Pressure | KW | 0.7 |
| Maximum Power | KW | 2.5 |
| Cooling Water Requirements | Min. Flow Rate L/min |
1.5 |
Bearing and Dilution N2 |
Bearing Seals L/min |
0 |
| Cabinet Dimensions LxWxH |
inches mm |
17.7 x 9.1 x 10.8 450 x 230 x 275 |
| Weight | lbs kg |
143 65 |
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