____
| Features | |
 |
Silane. Dynamic Oxidation Chamber |
|
Process flows up to 100 slm |
|
>99% Silane destruction |
|
>99% solids collection |
|
Low airflow interlock to shut off or bypass gas inlet(s) |
|
Cabinet exhaust for secondary containment |
|
No cooling water, No fuel gas |
|
Smallest footprint |
| Target Applications / Gases | |
|
Silane |
|
TEOS |
|
Tungsten |
|
Silane |
|
Dichlorosilane |
|
Ammonia |
|
Phosphine |
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