| Features | |
 |
Heater |
|
Dynamic Oxidation |
|
Water Scrubber |
|
Dual electric thermal unit, up to 1100 C |
|
Dual function water spray |
|
Reverse flow scrubber |
|
Central cleaning mechanism |
|
Ease of maintenance |
|
Minimal downtime |
| Target Applications / Gases | |
|
Chlorine |
|
Boron Trichloride |
|
Hydrogen Bromide |
|
Phosphine |
|
Arsine |
|
C2F6 |
|
CF4 |
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