| Features | |
 |
Dynamic Oxidation |
|
Water Scrubber |
|
Innovative solids handling |
|
Minimal water usage |
|
Maximum Uptime |
|
Ease of maintenance |
|
Fully enclosed cabinet |
| Target Applications / Gases | |
|
Chlorine |
|
Boron Trichloride |
|
Hydrogen Bromide |
|
Ammonia |
|
TEOS |
|
Dichlorosilane |
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