____EBARA's GDC250 point-of-use gas abatement system combines the features and benefits of a patented rolling burner and a high efficiency fan scrubber. The GDC250 is specifically designed for high decomposition abilities for both hydride and PFC (perfluorocompound) gases used in semiconductor applications.
____Special coatings, advanced corrosion resistant metal alloys and scrapers control corrosion and clogging issues experienced with today's harshest processes. With a small footprint, low utility consumption and multiple fuel burning methods, the GDC250 has the ability to treat 250 slm of inlet flow while removing the combustion solid by-products.
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Low running costs |
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High throughput (up to 4 process chambers) |
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High destruction efficiencies for PFC gases including CF4 |
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Deposition & cleaning gases can be treated simultaneously |
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SEMI S2-93 / CE Marked |
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