F-REX300SII

Features

EBARA is proud to present its advanced generation 300 mm CMP system the F-REX300SII. The four-head/four platen design with integrated three station cleaning and one dryer allows for flexibility in serial or parallel operation. New features include 3-step chemical clean, buff stations, and 4 FOUP loader ports. The production proven platform extends EBARA's capabilities far beyond the next generation products. Highest throughput combined with industry leading features makes this the choice of many leading 300 mm fabs.

4 polish platens, 3 cleaner and 1 dryer stations.
Advanced Process Performance. 1 head per platen.
Improved Productivity. High Throughput. Small Footprint. High reliability .
High volume production capable.
Multi process monitor (Eddy current, Optical, Table current) capable.
SECS/GEM, HSMS communication.
3 Step Chemical Clean Capability.