____EBARA's Wide-Range Type Turbomolecular Pump ET-W Series features the five-axis magnetic bearing and wide pressure range giving a clean vacuum environment.
____The ET-W Series has a large allowable backpressure (max. 3 Torr) enables simplification of foreline exhaust system. Anticorrosion models provide superior durability to all reactive gasses. The temperature controlled models provide less build-up of chemicals.
____ET-W Series provides a range of turbo pumps with pumping speed of N2 from 300 –1600 L/s.
ET 600WS Series Specification
| Flange | Inlet | VG 150 |
| Outlet |
NW 40 | |
| Pumping Speed |
N2 (L/S) | 460 |
| Maximum Compression Ratio | N2 | > 10 E 8 |
| N2 | 1 x 10 E 4 | |
| Ultimate Pressure | Torr | < 10 E-6 |
| Allowable Outlet Pressure |
Pa (Torr) | 400 (3) |
| Revolution Speed | RPM | 35,000 |
Run-Up Time |
Minutes | 8 |
| Installation Position | Any | |
| Vibration Level | um 0-p | < 0.01 |
| Pump Bake Out Temperature |
Deg C | max 100 |
| Bearing System | 5-axis magnetic bearing | |
| Cooling System | water | |
| Cooling Water Flow Rate | L / min | > 2 |
| N2 Gas Throughput for Purging | Pa-L/Sec (sccm) |
169 (100) |
| Weight | kg | 35 |
| Controller Model | 606W-TF | |
| Input Voltage | VAC | 200-240 |
| Frequency | Hz | 50/60 |
| Phases | 1 | |
| Maximum Current 200 (100) VAC |
A | 7 |
| Temperature | Deg C | 0 - 45 |
| Approx. Weight | Kg | 13 |
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