ET Series

Features

EBARA Turbomolecular Pumps, ET Series, offer full magnetic levitation, while providing clean, reliable vacuum for today's high technology environments. The ET Series features a five axis active magnetic bearing system and tuning free half rack controllers. Models range from 300 to 3300 l/s pumping speed, which have large allowable backpressures and corrosion resistance materials that provide superior durability to all reactive gases. Pump and controllers have interchangeability for the same models. Easy monitoring by liquid crystal displays (LCDs) show running conditions, operation hours, rotation speed and operating status (alarm trips).

Models range from 300 to 3300 l/s pumping speed.
Five axis active magnetic bearing system.
EBARA Turbo Pumps can be installed in any orientation.
Tuning free half rack controllers - pump and controllers have interchangeability for the same models.
Pump operating information displayed via LCD.
No back-up battery needed in case of power failure.
Controllers are equipped to operate the optional heaters.
CE marking, SEMI standards

Specifications

Model	ET300W	ET600W	ET1301W
Pumping Speed (N2)	300 L/s	600 L/s	1,300 L/s
Ultimate Pressure	< 10E-7 Pa	< 10E-7 Pa	< 10E-7 Pa
Maximum Outlet Pressure	400 Pa	400 Pa	400 Pa
Gas Inlet	VG100	VG150	VG200
Gas Outlet	KF25	KF40	KF40
Cooling water	> 2 L/min	> 2L/min	> 2L/min
N2 Gas	50 sccm	0.1 L/min	0.1 L/min
Voltage	100-240V single phase	200-240V single phase	200-240V single phase
Weight	15 kg	35 kg	40 kg
Controller Model	306W-TF	606W-TF	1306W-TF

Model	ET1600W	ET2500W	ET3300W
Pumping Speed (N2)	1,600 L/s	2,500 L/s	3,300 L/s
Ultimate Pressure	< 10E-7 Pa	< 10E-7 Pa	< 10E-7 Pa
Maximum Outlet Pressure	400 Pa	400 Pa	400 Pa
Gas Inlet	VG250	VG300	VG350
Gas Outlet	KF40	KF40	KF40
Cooling water	> 2 L/min	> 2L/min	> 2L/min
N2 Gas	0.1 L/min	0.1 L/min	0.1 L/min
Voltage	200-240V single phase	200-240V single phase	200-240V single phase
Weight	55 kg	80 kg	100 kg
Controller Model	1606W-TF	2506W-TF	3306W-TF