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ET Series

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Features
- EBARA Turbomolecular Pumps, ET Series, offer full magnetic levitation, while providing clean, reliable vacuum for today's high technology environments. The ET Series features a five axis active magnetic bearing system and tuning free half rack controllers. Models range from 300 to 3300 l/s pumping speed, which have large allowable backpressures and corrosion resistance materials that provide superior durability to all reactive gases. Pump and controllers have interchangeability for the same models. Easy monitoring by liquid crystal displays (LCDs) show running conditions, operation hours, rotation speed and operating status (alarm trips).
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- Models range from 300 to 3300 l/s pumping speed.
- Five axis active magnetic bearing system.
- EBARA Turbo Pumps can be installed in any orientation.
- Tuning free half rack controllers - pump and controllers have interchangeability for the same models.
- Pump operating information displayed via LCD.
- No back-up battery needed in case of power failure.
- Controllers are equipped to operate the optional heaters.
- CE marking, SEMI standards
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Specifications
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| Model |
ET300W |
ET600W |
ET1301W |
| Pumping Speed (N2) |
300 L/s |
600 L/s |
1,300 L/s |
| Ultimate Pressure |
< 10E-7 Pa |
< 10E-7 Pa |
< 10E-7 Pa |
| Maximum Outlet Pressure |
400 Pa |
400 Pa |
400 Pa |
| Gas Inlet |
VG100 |
VG150 |
VG200 |
| Gas Outlet |
KF25 |
KF40 |
KF40 |
| Cooling water |
> 2 L/min |
> 2L/min |
> 2L/min |
| N2 Gas |
50 sccm |
0.1 L/min |
0.1 L/min |
| Voltage |
100-240V single phase |
200-240V single phase |
200-240V single phase |
| Weight |
15 kg |
35 kg |
40 kg |
| Controller Model |
306W-TF |
606W-TF |
1306W-TF |
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| Model |
ET1600W |
ET2500W |
ET3300W |
| Pumping Speed (N2) |
1,600 L/s |
2,500 L/s |
3,300 L/s |
| Ultimate Pressure |
< 10E-7 Pa |
< 10E-7 Pa |
< 10E-7 Pa |
| Maximum Outlet Pressure |
400 Pa |
400 Pa |
400 Pa |
| Gas Inlet |
VG250 |
VG300 |
VG350 |
| Gas Outlet |
KF40 |
KF40 |
KF40 |
| Cooling water |
> 2 L/min |
> 2L/min |
> 2L/min |
| N2 Gas |
0.1 L/min |
0.1 L/min |
0.1 L/min |
| Voltage |
200-240V single phase |
200-240V single phase |
200-240V single phase |
| Weight |
55 kg |
80 kg |
100 kg |
| Controller Model |
1606W-TF |
2506W-TF |
3306W-TF |
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