____The EST Series consists of a two-stage screw design main pump engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed.
____The EST Series covers a wide pumping speed range from 88 to 1765 CFM. EST pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is onstructed of NiResist, a solid cast material known for its superior corrosion resistance.
- Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
- Variable pumping speed to match application requirements
- High performance brushless DC motors
- State-of-the-art control and monitoring devices
- Idle mode can be employed for increased utility savings
- SEMI S2 assessed, NRTL Listed, CE Marked
EST 25N Series Specifications:
| Pumping Speed 50/60 Hz |
CFM L/min M3/Hr |
88 2,500 150 |
| Ultimate Pressure 50/60 Hz |
mTorr Pa mBar |
20 2.67 0.267 |
| Connection | Gas Inlet | NW 40 |
| Gas Outlet | NW 40 | |
| Power at Ultimate Pressure | KW | 3 |
| Maximum Power | KW | 5.5 |
| Cooling Water Requirements | Min. Flow Rate L/min |
5 |
Bearing and Dilution N2 |
Bearing Seals L/min |
8 to 10 |
| Cabinet Dimensions LxWxH |
inches mm |
39 x 16 x 19.7 990 x 410 x 501 |
| Weight | lbs kg |
661 300 |
Copyrightc EBARA Precision Machinery Taiwan Inc. Limited , All Rights Reserved. Best Viewed in MSIE