____The ESR Series (Energy Saving Roots) is a multistage lobe design engineered for application in clean and medium duty processes such as Load Lock, SEM, PVD, Ashing, Ion Implantation and Etch.
____The ESR Series covers a wide pumping speed range from 46 to 706 CFM. ESR pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is constructed of NiResist, a solid cast material known for its superior corrosion esistance.
- Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
- No Nitrogen purge required for ESR20N in clean applications
- Variable pumping speed to match application requirements
- High performance brushless DC motors
- State-of-the-art control and monitoring devices
- Idle mode can be employed for increased utility savings
- SEMI S2 assessed, NRTL Listed, CE Marked
ESR 200WN Series Specifications:
| Pumping Speed 50/60 Hz |
CFM L/min M3/Hr |
353 - 706 10,000 - 20,000 600 - 1,200 |
| Ultimate Pressure 50/60 Hz |
mTorr Pa mBar |
1 0.13 0.0013 |
| Connection | Gas Inlet | ISO100 |
| Gas Outlet | NW 40 | |
| Power at Ultimate Pressure | KW | 0.8 - 1.1 |
| Maximum Power | KW | 5 |
| Cooling Water Requirements | Min. Flow Rate L/min |
2 |
Bearing and Dilution N2 |
Bearing Seals L/min |
2 to 12 |
| Cabinet Dimensions LxWxH |
inches mm |
31.1 x 15 x 25.8 790 x 380 x 644 |
| Weight | lbs kg |
520 250 |
Copyrightc EBARA Precision Machinery Taiwan Inc. Limited , All Rights Reserved. Best Viewed in MSIE