____Our Applications Engineering groups located in Japan and the U.S. continue to push the envelope of the challenges required for tomorrow's devices. Whether this entails working on copper and low k dielectric planarization or 300mm, EBARA has a CMP model that meets your need.
____EBARA has maintained its commitment to 300mm when many companies elected to postpone their programs. EBARA now offers two models of 300mm CMP systems, ready to lead the way with the key enabling technology. EBARA is prepared to demonstrate our 300mm tool in either an R&D environment or in high volume production today.
____EBARA CMP - FREX200 and FREX300 are the enhanced versions of our dry in/dry out integrated clean CMP system. The FREX200 offers a two-head, two-platen design with an optional buff station for greater process flexibility and increased throughput. The FREX300 offers a two-head, two-platen and two-buff stations design, which allows for a customized process recipes and 40% increase in throughput.
FREX200 - Chemical Mechanical Polishing Specifications:
EBARA's 200 mm CMP system, the FREX200 utilizes EBARA's proven Dry-In / Dry-Out processing technology. The 2 platens, 1 head per platen deign with integrated four clean stations allows for flexibility in serial or parallel operation. Configuration options include: a Buff Polish Station, 4-Cassette Interface, Host Communication (Cim), Multiple Process Monitoring Capabilities, and Slurry/Chemical Supply Units. The FREX 200 is a flexible, user-oriented system.
FREX300 - Chemical Mechanical Polishing Specifications:
EBARA is proud to present its next generation 300 mm CMP system the FREX300. This tool utilizes EBARA's proven Dry-In / Dry-Out processing technology. The two-head/two platen design with integrated four station cleaning allows for flexibility in serial or parallel operation. New features include 3-step chemical clean, buff stations, and 4 FOUP loader ports. The production proven platform extends EBARA's capabilities far beyond the next generation products. A 40% increase in throughput combined with industry leading features makes this the choice of many leading 300 mm fabs.
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