Point of Use Abatement  

____Ebara offers a line of Point-of-Use Abatement systems capable of handling most processes in the microelectronics industry. Our abatement product line includes wet, combustion, catalytic, dynamic oxidation and thermal technologies. All of Ebara's abatement technologies are designed for low cost of ownership, high reliability and compliance to safety standards.

 

Features Target Applications / Gases
Zero Scrubber Related Process Tool Downtime EPI
Field Proven (>1000 units) Chlorosilanes
Higher Wafer Yields Hydrogen Chloride
Max. Flow Rate of Input Gas is 600SLM Poly Etch / CVD
99.999% Removal of Water Soluble Gases ALD
Patented Gas Inlet Minimizes Clogging Silicon Nitride
Automatic Inlet Plunger Eliminates Downtime TEOS
High Flow Spray Chambers Tungsten Deposition
Unique Packed Column Design Ammonia
Unique Packed Column Design Fluorosilanes
PLC Based Scrubber Control Box Hydrogen Bromide
Dry Contact Tool Interface / Interlock Metal etch
ˇ§Standby Modeˇ¨ Reduces Water Consumption to <1% of Standard Usage [~2GPM to ~1GPH]
Chlorine
Footprint: 24.5ˇ¨ x 32.5ˇ¨ Hydrogen Chloride
Boron Trichloride

Cyclone Details
Gas Inlet Devices
Patent gas inlet devices minimize rate of restriction and automatic gas inlet plunger removes restrictions without process interruptions

Second Scrubbing Chamber
Five fine spray, high velocity nozzles ensures effective removal of impurities
First Scrubbing Chamber
Coarse spray, high flow nozzle coats chamber and removes bulk impurities
Pump
Corrosion resistant high ouput and long life recirculates 35 GPM
Small Foot Print
24 1/2" x 32 1/2"
Sump Geometry
Unique pump input, drain and fresh water input locations prevent foaming, sediment and minimize water use
Fresh Water Input
Strategic position increases efficiency
minimizes water use and eliminates foam
Packed Column

The final polish. Packing Requires no maintenance or replacement


Eductor Cone
Keeps exhaust line at slightly negative pressure (a nominal draw of 1-2" of water)


Copyrightc EBARA Presicion Machinery Taiwan Inc. Limited , All Rights Reserved. Best Viewed in MSIE